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Thermal desorption issues related to silicidation and back-end metallization

dc.contributor.authorLi, Hua
dc.contributor.authorVereecke, Guy
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorSleeckx, Erik
dc.contributor.authorMaex, Karen
dc.contributor.authorFroyen, L.
dc.date.accessioned2021-10-14T13:15:59Z
dc.date.available2021-10-14T13:15:59Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4529
dc.sourceIIOimport
dc.titleThermal desorption issues related to silicidation and back-end metallization
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage577
dc.source.endpage581
dc.source.conferenceAdvanced Metallization Conference 1999 - AMC 1999
dc.source.conferencedate28/09/1999
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - open access


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