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Soft X-Ray Absorption Spectroscopy Investigation of HfO<sub>2</sub> and ZrO<sub>2</sub> Thin Films with Modulated Crystalline Phase by Varying Dopants (Al, Si, Gd) for Ferroelectric and High-<i>k</i> Dielectric Applications
Publication:
Soft X-Ray Absorption Spectroscopy Investigation of HfO<sub>2</sub> and ZrO<sub>2</sub> Thin Films with Modulated Crystalline Phase by Varying Dopants (Al, Si, Gd) for Ferroelectric and High-<i>k</i> Dielectric Applications
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Date
2025-MAR 6
Journal article
https://doi.org/10.1002/pssr.202400385
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kim, Hyun-Cheol
;
Popovici, Mihaela Ioana
;
Herrero-Martin, Javier
;
Meersschaut, Johan
;
Dekkers, Harold
;
Kwon, Dae Seon
;
Van Houdt, Jan
Journal
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
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178
since deposited on 2025-03-14
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Acq. date: 2026-01-08
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Views
178
since deposited on 2025-03-14
3
last month
Acq. date: 2026-01-08
Citations