Soft X-Ray Absorption Spectroscopy Investigation of HfO2 and ZrO2 Thin Films with Modulated Crystalline Phase by Varying Dopants (Al, Si, Gd) for Ferroelectric and High-k Dielectric Applications

Publication:

2025-MAR 6

Journal article

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PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS

180 since deposited on 2025-03-14

2last month

Acq. date: 2026-02-25