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Soft X-Ray Absorption Spectroscopy Investigation of HfO<sub>2</sub> and ZrO<sub>2</sub> Thin Films with Modulated Crystalline Phase by Varying Dopants (Al, Si, Gd) for Ferroelectric and High-<i>k</i> Dielectric Applications

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178 since deposited on 2025-03-14
3last month
Acq. date: 2026-01-08

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178 since deposited on 2025-03-14
3last month
Acq. date: 2026-01-08

Citations