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Articles
Multi-contrast benchmarking of edge illumination Monte Carlo simulations using virtual gratings
Publication:
Multi-contrast benchmarking of edge illumination Monte Carlo simulations using virtual gratings
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Date
2025-MAR 14
Journal article
https://doi.org/10.1063/5.0244152
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sanctorum, Jonathan
;
Sijbers, Jan
;
De Beenhouwer, Jan
Journal
JOURNAL OF APPLIED PHYSICS
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164
since deposited on 2025-03-21
1
last month
Acq. date: 2026-01-07
Citations
Metrics
Views
164
since deposited on 2025-03-21
1
last month
Acq. date: 2026-01-07
Citations