Publication:

Atomic Layer Deposition of Boron-Containing Layers Using a Combined Trimethylborate- and Water-Based Plasma

Date

2025-APR 22

Journal article

https://doi.org/10.1021/acs.chemmater.4c03385

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Author(s)

;

Werbrouck, Andreas

;

;

Verhelle, Tippi

;

Minjauw, Matthias M.

;

Meersschaut, Johan

;

Henderick, Lowie

;

Dendooven, Jolien

;

Detavernier, Christophe

Journal

CHEMISTRY OF MATERIALS

Metrics

128 since deposited on 2025-05-03

3last month

Acq. date: 2026-01-09