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Effect of silicidation schemes on interface contact resistance

dc.contributor.authorWang, Qingfeng
dc.contributor.authorLauwers, Anne
dc.contributor.authorDeweerdt, Bruno
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-29T12:53:06Z
dc.date.available2021-09-29T12:53:06Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/455
dc.sourceIIOimport
dc.titleEffect of silicidation schemes on interface contact resistance
dc.typeProceedings paper
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorDeweerdt, Bruno
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage283
dc.source.endpage286
dc.source.conference24th European Solid State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/1994
dc.source.conferencelocationEdinburgh UK
imec.availabilityPublished - open access


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