Publication:

In-Poor IGZO: Superior Resilience to Hydrogen in Forming Gas Anneal and PBTI

Date

2025-APR 28

Journal article

https://doi.org/10.1021/acsaelm.5c00383

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Author(s)

Kruv, Anastasiia

;

van Setten, Michiel J.

;

;

Matsubayashi, Daisuke

;

Dekkers, Hendrik F. W.

;

Pavel, Alexandru

;

;

;

Rassoul, Nouredine

;

;

;

Subhechha, Subhali

;

Pourtois, Geoffrey

;

Belmonte, Attilio

;

Kar, Gouri Sankar

Journal

ACS APPLIED ELECTRONIC MATERIALS

Metrics

118 since deposited on 2025-05-11

4last month

Acq. date: 2026-01-10