Publication:

OPC and Modeling Solution to Support 0.55NA EUV Stitching

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3034957

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Author(s)

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Gillijns, Werner

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Fenger, Germain

Journal

Proceedings of SPIE

Statistics

139 since deposited on 2025-05-11

Acq. date: 2026-04-15