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High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors

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76 since deposited on 2025-05-14
Acq. date: 2026-09-18

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Acq. date: 2026-09-18

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Downloads

76 since deposited on 2025-05-14
Acq. date: 2026-09-18

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147 since deposited on 2025-05-14
9last month
6last week
Acq. date: 2026-09-18

Citations