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High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors
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High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors
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Date
2025-03-31
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pondini, Andrea
;
Eyben, Pierre
;
Wouters, Lennaert
;
Hantschel, Thomas
;
Mitard, Jerome
;
Verhulst, Anne
Journal
Forum des microscopies à sondes locales 2025
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Downloads
7
since deposited on 2025-05-14
5
last month
2
last week
Acq. date: 2026-01-06
Views
118
since deposited on 2025-05-14
1
last month
Acq. date: 2026-01-07
Citations