Publication:

High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors

Date

2025
Meeting abstract
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-7422-079X
cris.virtual.orcid0000-0002-3742-9017
cris.virtual.orcid0009-0007-5242-2159
cris.virtual.orcid0000-0001-9476-4084
cris.virtual.orcid0000-0002-6730-9542
cris.virtual.orcid0000-0003-3686-556X
cris.virtualsource.department821dc741-8843-4d53-8e1d-6f543228a740
cris.virtualsource.department8453626e-0277-4da2-913a-9d997d2a144f
cris.virtualsource.department92687dcd-7b3e-4dd2-bddf-ec5372d0613b
cris.virtualsource.departmente754b012-c4f4-4d96-8cf4-048fae6e57b3
cris.virtualsource.department469e1399-f329-43a3-99ac-ef37c3eda6d3
cris.virtualsource.departmentd76d4ea6-71ac-4b8e-ae7c-533e45a0069c
cris.virtualsource.orcid821dc741-8843-4d53-8e1d-6f543228a740
cris.virtualsource.orcid8453626e-0277-4da2-913a-9d997d2a144f
cris.virtualsource.orcid92687dcd-7b3e-4dd2-bddf-ec5372d0613b
cris.virtualsource.orcide754b012-c4f4-4d96-8cf4-048fae6e57b3
cris.virtualsource.orcid469e1399-f329-43a3-99ac-ef37c3eda6d3
cris.virtualsource.orcidd76d4ea6-71ac-4b8e-ae7c-533e45a0069c
dc.contributor.authorPondini, Andrea
dc.contributor.authorEyben, Pierre
dc.contributor.authorWouters, Lennaert
dc.contributor.authorHantschel, Thomas
dc.contributor.authorMitard, Jerome
dc.contributor.authorVerhulst, Anne
dc.contributor.imecauthorPondini, Andrea
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.orcidimecPondini, Andrea::0009-0007-5242-2159
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.date.accessioned2025-05-14T07:45:36Z
dc.date.available2025-05-14T07:45:36Z
dc.date.issued2025
dc.identifier.issn/
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45663
dc.source.beginpage1
dc.source.conferenceForum des microscopies à sonde locale
dc.source.conferencedate2025-03-31
dc.source.conferencelocationSpa, Belgium
dc.source.journalForum des Microscopies à Sondes Locales 2025
dc.source.numberofpages1
dc.subject.disciplineMaterials science
dc.subject.keywordsSSRM
dc.subject.keywordsScanning Spreading Resistance Microscopy
dc.subject.keywordsNSFET
dc.subject.keywordsGAA
dc.title

High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors

dc.typeMeeting abstract
dspace.entity.typePublication
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