Publication:

High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors

Date

2025-03-31
Meeting abstract
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dc.contributor.authorPondini, Andrea
dc.contributor.authorEyben, Pierre
dc.contributor.authorWouters, Lennaert
dc.contributor.authorHantschel, Thomas
dc.contributor.authorMitard, Jerome
dc.contributor.authorVerhulst, Anne
dc.contributor.imecauthorPondini, Andrea
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.orcidimecPondini, Andrea::0009-0007-5242-2159
dc.contributor.orcidimecEyben, Pierre::0000-0003-3686-556X
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.date.accessioned2025-05-14T07:45:36Z
dc.date.available2025-05-14T07:45:36Z
dc.date.issued2025-03-31
dc.identifier.issnX
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45663
dc.source.conferenceForum des microscopies à sonde locale
dc.source.conferencedate31/03/2025
dc.source.conferencelocationSpa, Belgium
dc.source.journalForum des microscopies à sondes locales 2025
dc.source.numberofpages1
dc.subject.disciplineMaterials science
dc.subject.keywordsSSRM
dc.subject.keywordsScanning Spreading Resistance Microscopy
dc.subject.keywordsNSFET
dc.subject.keywordsGAA
dc.title

High-resolution Scanning Spreading Resistance Microscopy (SSRM) for carrier mapping in nanoscale gate‑all‑around (GAA) transistors

dc.typeMeeting abstract
dspace.entity.typePublication
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