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Articles
Sub-resolution grating as an option for mask 3D effect mitigation in anamorphic imaging system
Publication:
Sub-resolution grating as an option for mask 3D effect mitigation in anamorphic imaging system
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Date
2025-JAN 1
Journal article
https://doi.org/10.1117/1.JMM.24.1.011007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lee, Inhwan
;
Franke, Joern-Holger
;
Philipsen, Vicky
;
Ronse, Kurt
;
De Gendt, Stefan
;
Hendrickx, Eric
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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113
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Acq. date: 2026-01-09
Citations
Metrics
Views
113
since deposited on 2025-05-17
3
last month
2
last week
Acq. date: 2026-01-09
Citations