Authors
Meuris, Marc;
Arnauts, Sophia;
Cornelissen, Ingrid;
Kenis, Karine;
Lux, Marcel;
De Gendt, Stefan;
Mertens, Paul;
Teerlinck, Ivo;
Vos, Rita;
Loewenstein, Lee;
Heyns, Marc;
Wolke, K.
Conference
7th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal; 19-21 June 2000; Newark, NJ, USA.
Title
The IMEC-Clean: A clean for advanced CMOS manufacturing
Publication type
Oral presentation
