Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAM

Izukashi, K.; Matsubayashi, D.; Belmonte, A.; Kundu, S.; Wan, Y.; Redondo, F. G.; Oh, H.; Sharma, A.; Subhechha, S.; Puliyalil, H.; Chasin, A.; Dekkers, H.; Pavel, A.; Rassoul, N.; Kar, G. S.

doi:10.1109/LED.2025.3564187

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Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAM

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2025-JUL

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https://doi.org/10.1109/LED.2025.3564187

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IEEE ELECTRON DEVICE LETTERS

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48 since deposited on 2025-07-14

Acq. date: 2026-01-10

Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAM

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