Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

Li, Yingying; Bleiker, Simon J.; Worsey, Elliott; Dagon, Mael; Edinger, Pierre; Takabayashi, Alain Yuji; Quack, Niels; Verheyen, Peter; Bogaerts, Wim; Gylfason, Kristinn B.; Pamunuwa, Dinesh; Niklaus, Frank

doi:10.1038/s41378-025-00964-w

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Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

Date

2025-JUL 11

Journal article

https://doi.org/10.1038/s41378-025-00964-w

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Takabayashi, Alain Yuji

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Quack, Niels

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Verheyen, Peter

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Bogaerts, Wim

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Gylfason, Kristinn B.

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Pamunuwa, Dinesh

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Niklaus, Frank

Journal

MICROSYSTEMS & NANOENGINEERING

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44 since deposited on 2025-07-20

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Acq. date: 2026-01-26

Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

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