Publication:
Biocompatible and Hermetic Encapsulation of PMUTs: Effects of Parylene F-VT4 and ALD Stacks on Membrane Vibration and Acoustic Performance
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44 since deposited on 2025-07-20
2last month
Acq. date: 2026-01-09
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44 since deposited on 2025-07-20
2last month
Acq. date: 2026-01-09
Citations