Optimization toward Non-Zero Offset Stability in Overlay Control: Trends and Prospects

Gutman, Nadav; Baudemprez, Bart; Yang, Hongcheon; Beral, Christophe; Charley, Anne-Laure; Bouckou, Loemba; Gronheid, Roel; Weiss, Yaniv; Napso, Sofia Linoy; Nagar-shaul; Zhang, Chufan; Klein, Dana; Lamhot, Yuval; Lubashevsky, Yuval; Milo, Renan; Megged, Efi

doi:10.1117/12.3051073

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Optimization toward Non-Zero Offset Stability in Overlay Control: Trends and Prospects

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051073

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Gutman, Nadav

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Bouckou, Loemba

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Gronheid, Roel

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Weiss, Yaniv

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Napso, Sofia Linoy

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Nagar-shaul

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Zhang, Chufan

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Klein, Dana

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Lamhot, Yuval

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Lubashevsky, Yuval

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Milo, Renan

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Megged, Efi

Journal

Proceedings of SPIE

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61 since deposited on 2025-07-28

Acq. date: 2026-06-19

Optimization toward Non-Zero Offset Stability in Overlay Control: Trends and Prospects

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