Publication:

3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3052524
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Author(s)

Beggiato, Matteo  
;
Loo, Roger  
;
Wei, S.
;
Moussa, Alain  
;
Bast, G.
;
Fukaya, K.
;
Cerbu, Dorin  
;
Janardan, Nachiketa  
;
Chirko, K.
;
Han, Han  
;
Dialameh, Masoud  
;
Santoro, G.
;
Lorusso, Gian  
;
Isawa, M.
;
Wimmer, P.
;
Kranert, C.
;
Reimann, C.
;
Kuhn, M.
;
Vigliante, A.
;
Meersschaut, Johan  
;
Belmonte, Attilio  
;
Cross, A.
;
Cockburn, A.
;
Beral, Christophe  
;
Charley, Anne-Laure  
;
Kar, Gouri Sankar  
;
Bogdanowicz, Janusz  

Journal

Proceedings of SPIE

Abstract

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72 since deposited on 2025-07-28
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Acq. date: 2026-08-09

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