Publication:
Enabling chemically amplified resists towards tight pitch EUV patterning by directed self-assembly
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38 since deposited on 2025-07-31
3last month
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Acq. date: 2026-01-10
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Views
38 since deposited on 2025-07-31
3last month
1last week
Acq. date: 2026-01-10
Citations