Publication:

Enablement of 0.55NA EUV Bright Field Mask Stitching

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051285
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Author(s)

Xu, Dongbo
;
Zeng, Qinglin
;
Gillijns, Werner  
;
Zeng, Xuefeng
;
Sun, Yuyang
;
Fenger, Germain

Journal

Proceedings of SPIE

Abstract

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46 since deposited on 2025-07-31
Acq. date: 2026-06-11

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46 since deposited on 2025-07-31
Acq. date: 2026-06-11

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