Authors

Nakabayashi, M.; Ohyama, Hidenori; Kobayashi, K.; Yoneoka, M.; Simoen, Eddy; Claeys, C.; Takami, Y.; Sunaga, H.; Takizawa, H.

Conference

MRS Spring Meeting 2000. Symposium A:Amorphous and Heterogeneous Silicon Thin Films - 2000; 24-28 April 2000; San Francisco, Ca,

Title

Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistors

Publication type

Oral presentation