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Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistors

dc.contributor.authorNakabayashi, M.
dc.contributor.authorOhyama, Hidenori
dc.contributor.authorKobayashi, K.
dc.contributor.authorYoneoka, M.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, C.
dc.contributor.authorTakami, Y.
dc.contributor.authorSunaga, H.
dc.contributor.authorTakizawa, H.
dc.date.accessioned2021-10-14T13:26:17Z
dc.date.available2021-10-14T13:26:17Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4606
dc.sourceIIOimport
dc.titleInfluence of mechanical stress on the electrical performance of polycrystalline-silicon resistors
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting 2000. Symposium A:Amorphous and Heterogeneous Silicon Thin Films - 2000; 24-28 April 2000; San Francisco, Ca,
dc.source.conferencelocation
imec.availabilityPublished - imec


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