Publication:

A study on programmed defect propagation from design to mask to wafer using SEM metrology

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3035709

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Author(s)

Baskaran, Balakumar

;

;

Reddy, Bojja Aditya

;

Beggiato, Matteo

;

;

Beral, Christophe

;

Charley, Anne-Laure

;

;

;

Leray, Philippe

Journal

Proceedings of SPIE

Metrics

14 since deposited on 2025-08-29

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Acq. date: 2026-01-10