Publication:

Logic and memory patterning breakthrough using High-NA lithography

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3047176
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Author(s)

Blanco, Victor  
;
Roy, S.
;
Chowrira, B.
;
Pham, Van Tuong  
;
Wouters, J.
;
Das, S.
;
Decoster, Stefan  
;
Leray, Philippe  
;
Liu, Ru-Gun  
;
Ronse, Kurt  
;
Vandenberghe, Geert  
;
Niroomand, Ardavan  
;
Foubert, Philippe  
;
Rutigliani, V. D.
;
Suh, Hyo Seon  
;
Gupta, Mihir  
;
De Simone, Danilo  
;
Dusa, Mircea  
;
Beral, Christophe  
;
Philipsen, Vicky  
;
Wiaux, Vincent  
;
Franke, Joern-Holger  
;
Bekaert, Joost  
;
Baskaran, Balakumar  
;
Gillijns, Werner  
;
Kim, Ryan Ryoung Han  
;
Sherazi, Yasser  
;
Vats, H.
;
Cupak, Miroslav  
;
Chang, C.
;
Lin, Y.-J.
;
Lee, J.
;
Hwang, Soobin  
;
Yang, Kiho  
;
Miyaguchi, Kenichi  

Journal

Proceedings of SPIE

Abstract

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12 since deposited on 2025-08-29
Acq. date: 2026-01-09

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12 since deposited on 2025-08-29
Acq. date: 2026-01-09

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