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34 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask Geometries
Publication:
34 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask Geometries
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Date
2024
Proceedings Paper
https://doi.org/10.1117/12.3034675
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Raut, H. K.
;
Hasan, Mahmudul
;
Das, Arijit
;
Pak, Murat
Journal
Proceedings of SPIE
Abstract
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Acq. date: 2026-01-09
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17
since deposited on 2025-08-29
3
last month
Acq. date: 2026-01-09
Citations