Publication:
34 nm Pitch Orthogonal Pillar Patterning Enabled by Different Mask Geometries
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35 since deposited on 2025-08-29
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Acq. date: 2026-09-17
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Statistics
Views
35 since deposited on 2025-08-29
2last month
2last week
Acq. date: 2026-09-17
Citations