Publication:
Multi-step trap-assisted tunneling in Al-doped HfO<sub>2</sub> used in advanced 2.5D metal-insulator-metal capacitors
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16 since deposited on 2025-09-01
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Acq. date: 2026-04-27
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16 since deposited on 2025-09-01
1last month
1last week
Acq. date: 2026-04-27
Citations