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Multi-step trap-assisted tunneling in Al-doped HfO<sub>2</sub> used in advanced 2.5D metal-insulator-metal capacitors

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11 since deposited on 2025-09-01
1last month
Acq. date: 2026-02-25

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11 since deposited on 2025-09-01
1last month
Acq. date: 2026-02-25

Citations