Publication:
The effect of deposition and annealing conditions on the stress in metallization materials for VLSI interconnects
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1919 since deposited on 2021-09-29
5last month
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Acq. date: 2026-10-12
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Statistics
Views
1919 since deposited on 2021-09-29
5last month
3last week
Acq. date: 2026-10-12
Citations