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Implementation of the system of experiment design and taboo search into SiON thin film technology
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Authors
Popov, I.
;
Van Calster, Andre
;
De Baets, Johan
;
De Pauw, Herbert
Conference
3rd SIAM Conference on Mathematical Aspects of Materials Science; May 2000; Philadelphia, PA, USA.
Title
Implementation of the system of experiment design and taboo search into SiON thin film technology
Publication type
Oral presentation
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