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Implementation of the system of experiment design and taboo search into SiON thin film technology

dc.contributor.authorPopov, I.
dc.contributor.authorVan Calster, Andre
dc.contributor.authorDe Baets, Johan
dc.contributor.authorDe Pauw, Herbert
dc.date.accessioned2021-10-14T13:35:33Z
dc.date.available2021-10-14T13:35:33Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4670
dc.sourceIIOimport
dc.titleImplementation of the system of experiment design and taboo search into SiON thin film technology
dc.typeOral presentation
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.imecauthorDe Baets, Johan
dc.contributor.imecauthorDe Pauw, Herbert
dc.source.peerreviewno
dc.source.conference3rd SIAM Conference on Mathematical Aspects of Materials Science; May 2000; Philadelphia, PA, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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