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High-energy boron-implantation and proton-irradiation effects in diodes with shallow trench isolation
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Authors
Poyai, Amporn
;
Simoen, Eddy
;
Claeys, Cor
;
Hayama, Kiyoteru
;
Kobayashi, K.
;
Ohyama, Hidenori
;
Takizawa, H.
;
Kokkoris, M.
;
Kossionides, E.
;
Fanourakis, G.
;
Mohammadzadeh, A.
Conference
Proceedings 2nd ENDEASD Workshop
Title
High-energy boron-implantation and proton-irradiation effects in diodes with shallow trench isolation
Publication type
Proceedings paper
Embargo date
9999-12-31
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