Publication:

High-energy boron-implantation and proton-irradiation effects in diodes with shallow trench isolation

Date

2000

Proceedings Paper

Simple item page Full metadata Statistics

Files

4670.pdf 1.01 MB

Author(s)

;

;

;

Hayama, Kiyoteru

;

;

Ohyama, Hidenori

;

;

;

Kossionides, E.

;

;

Mohammadzadeh, A.

Statistics

2017 since deposited on 2021-10-14

Acq. date: 2026-02-25