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Ion beam synthesis of buried CoxNi1-xSi2 layers in silicon
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Authors
Wu, Ming Fang
;
De Wachter, Jo
;
Van Bavel, Mieke
;
Pattyn, H.
;
Langouche, G.
;
Vanhellemont, Jan
;
Bender, Hugo
;
Temst, K.
;
Bruynseraede, Y.
Conference
Silicides, Germanides, and their Interfaces
Title
Ion beam synthesis of buried CoxNi1-xSi2 layers in silicon
Publication type
Proceedings paper
Embargo date
9999-12-31
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