Ion beam synthesis of buried CoxNi1-xSi2 layers in silicon

Thumbnail
View/open
Metadata
Show full item record
Authors
Wu, Ming Fang; De Wachter, Jo; Van Bavel, Mieke; Pattyn, H.; Langouche, G.; Vanhellemont, Jan; Bender, Hugo; Temst, K.; Bruynseraede, Y.
Conference
Silicides, Germanides, and their Interfaces
Title
Ion beam synthesis of buried CoxNi1-xSi2 layers in silicon
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections