Authors

Krishnasamy, Rajendran; Schoenmaker, Wim; Decoutere, Stefaan; Caymax, Matty

Conference

Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices - SISPAD

Title

Simulation of boron diffusion in strained Si1-xGex epitaxial layers

Publication type

Proceedings paper

Embargo date

9999-12-31