Authors

Richard, Emmanuel; Vervoort, Iwan; Brongersma, Sywert; Bender, Hugo; Beyer, Gerald; Palmans, Roger; Lagrange, Sébastien; Maex, Karen

Conference

Advanced Metallization Conference 1999 - AMC 1999

Title

Roles of additives during filling process of damascene structures with electrochemical deposited copper

Publication type

Proceedings paper

Embargo date

9999-12-31