dc.contributor.author | Richard, Emmanuel | |
dc.contributor.author | Vervoort, Iwan | |
dc.contributor.author | Brongersma, Sywert | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Palmans, Roger | |
dc.contributor.author | Lagrange, Sébastien | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-14T13:38:48Z | |
dc.date.available | 2021-10-14T13:38:48Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4692 | |
dc.source | IIOimport | |
dc.title | Roles of additives during filling process of damascene structures with electrochemical deposited copper | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Brongersma, Sywert | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 149 | |
dc.source.endpage | 153 | |
dc.source.conference | Advanced Metallization Conference 1999 - AMC 1999 | |
dc.source.conferencedate | 28/09/1999 | |
dc.source.conferencelocation | Orlando, FL USA | |
imec.availability | Published - open access | |