Publication:

Status of ArF lithography for the 130nm technology node

Date

2000

Proceedings Paper

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Files

4707.pdf 1.49 MB

Author(s)

;

Vandenberghe, Geert

;

Jaenen, Patrick

;

Delvaux, Christie

;

Vangoidsenhoven, Diziana

;

Van Roey, Frieda

;

Pollers, Ingrid

;

Maenhoudt, Mireille

;

Goethals, Mieke

;

Pollentier, Ivan

;

;

van Ingen Schenau, K.

;

;

;

;

Niroomand, Ardavan

Metrics

2008 since deposited on 2021-10-14

2last month

Acq. date: 2026-01-09