Status of ArF lithography for the 130nm technology node

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Authors
Ronse, Kurt; Vandenberghe, Geert; Jaenen, Patrick; Delvaux, Christie; Vangoidsenhoven, Diziana; Van Roey, Frieda; Pollers, Ingrid; Maenhoudt, Mireille; Goethals, Mieke; Pollentier, Ivan; Vleeming, Bert; van Ingen Schenau, K.; Heskamp, B.; Davies, G.; Finders, Jo; Niroomand, Ardavan
Conference
Optical Microlithography XIII
Title
Status of ArF lithography for the 130nm technology node
Publication type
Proceedings paper
Embargo date
9999-12-31
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