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Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends
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Authors
Serrano, Javier
;
De Witte, Hilde
;
Guzman, B.
;
Blanco, J. M.
;
Vandervorst, Wilfried
Conference
Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
Title
Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends
Publication type
Proceedings paper
Embargo date
9999-12-31
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