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Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends

dc.contributor.authorSerrano, Javier
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorGuzman, B.
dc.contributor.authorBlanco, J. M.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T13:45:43Z
dc.date.available2021-10-14T13:45:43Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4738
dc.sourceIIOimport
dc.titleSynthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage135
dc.source.endpage138
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
dc.source.conferencedate5/09/1999
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - open access


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