dc.contributor.author | Steegen, An | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Chamirian, Oxana | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | de Potter de ten Broeck, Muriel | |
dc.contributor.author | De Tavernier, C. | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-14T13:50:31Z | |
dc.date.available | 2021-10-14T13:50:31Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4769 | |
dc.source | IIOimport | |
dc.title | Stress build-up during the Ni-silicidation in and around narrow silicide lines | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | no | |
dc.source.conference | MRS Spring Meeting 2000. Symposium C: Gate Stack and Silicide Issues in Silicon Processing | |
dc.source.conferencedate | 24/04/2000 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |