Stress build-up during the Ni-silicidation in and around narrow silicide lines

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Authors
Steegen, An; Lauwers, Anne; Chamirian, Oxana; Bender, Hugo; De Wolf, Ingrid; de Potter de ten Broeck, Muriel; De Tavernier, C.; Maex, Karen
Conference
MRS Spring Meeting 2000. Symposium C: Gate Stack and Silicide Issues in Silicon Processing
Title
Stress build-up during the Ni-silicidation in and around narrow silicide lines
Publication type
Oral presentation
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