Publication:

Stress build-up during the Ni-silicidation in and around narrow silicide lines

Date

2000
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Author(s)

Steegen, An
;
Lauwers, Anne  
;
Chamirian, Oxana
;
Bender, Hugo  
;
De Wolf, Ingrid  
;
de Potter de ten Broeck, Muriel  
;
De Tavernier, C.
;
Maex, Karen  

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1902 since deposited on 2021-10-14
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1902 since deposited on 2021-10-14
Acq. date: 2026-02-24

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