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Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
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Authors
Stephenson, Robert
;
De Wolf, Peter
;
Trenkler, Thomas
;
Hantschel, Thomas
;
Clarysse, Trudo
;
Jansen, Philippe
;
Vandervorst, Wilfried
Issue
1
Journal
J. Vacuum Science and Technology B
Volume
B18
Title
Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization
Publication type
Journal article
Embargo date
9999-12-31
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