Material characteristics and damascene patterning of a fluoropolymer low-k film

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Authors
Struyf, Herbert; Donaton, R. A.; Lepage, Muriel; Lanckmans, Filip; Vereecke, Guy; Maex, Karen; Vanhaelemeersch, Serge; Scheid, D.
Conference
Advanced Metallization Conference; October 2000; San Diego, CA, USA.
Title
Material characteristics and damascene patterning of a fluoropolymer low-k film
Publication type
Oral presentation
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