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Material characteristics and damascene patterning of a fluoropolymer low-k film

dc.contributor.authorStruyf, Herbert
dc.contributor.authorDonaton, R. A.
dc.contributor.authorLepage, Muriel
dc.contributor.authorLanckmans, Filip
dc.contributor.authorVereecke, Guy
dc.contributor.authorMaex, Karen
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorScheid, D.
dc.date.accessioned2021-10-14T13:51:57Z
dc.date.available2021-10-14T13:51:57Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4778
dc.sourceIIOimport
dc.titleMaterial characteristics and damascene patterning of a fluoropolymer low-k film
dc.typeOral presentation
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; October 2000; San Diego, CA, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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