Authors

Stuer, Cindy; Van Landuyt, J.; Bender, Hugo; Rooyackers, Rita; Badenes, Gonçal; De Wolf, Ingrid

Conference

International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha

Title

The use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures

Publication type

Oral presentation