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Analysing antenna ratio dependence of plasma charging damage with Weibull breakdown statistics

dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorCreusen, Martin
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-14T13:57:47Z
dc.date.available2021-10-14T13:57:47Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4814
dc.sourceIIOimport
dc.titleAnalysing antenna ratio dependence of plasma charging damage with Weibull breakdown statistics
dc.typeProceedings paper
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage528
dc.source.endpage531
dc.source.conferenceProceedings of the 30th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/2000
dc.source.conferencelocationCork Ireland
imec.availabilityPublished - open access


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