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Anomalously weak antenna ratio dependence of plasma process-induced damage

dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorCreusen, Martin
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-14T13:57:57Z
dc.date.available2021-10-14T13:57:57Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4815
dc.sourceIIOimport
dc.titleAnomalously weak antenna ratio dependence of plasma process-induced damage
dc.typeProceedings paper
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage6
dc.source.endpage9
dc.source.conferenceProceedings of the 5th International Symposium on Plasma Process-Induced Damage - P2ID
dc.source.conferencedate23/05/2000
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access


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