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Electrocoagulation as a viable technique to treat (cu-)CMP wastes

dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorTrenkler, Daniela
dc.contributor.authorVan den Broeck, Kristel
dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T14:00:25Z
dc.date.available2021-10-14T14:00:25Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4830
dc.sourceIIOimport
dc.titleElectrocoagulation as a viable technique to treat (cu-)CMP wastes
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage313
dc.source.endpage316
dc.source.conferenceProceedings of the 9th International Semiconductor Manufacturing Symposium - ISSM
dc.source.conferencedate26/09/2000
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - open access


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