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Conference contributions
An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
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An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
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Date
2000
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Spengen, Merlijn
;
De Wolf, Ingrid
;
Puers, Bob
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Abstract
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1871
since deposited on 2021-10-14
3
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Acq. date: 2025-12-10
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Metrics
Views
1871
since deposited on 2021-10-14
3
last month
Acq. date: 2025-12-10
Citations