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An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-14T14:04:32Z
dc.date.available2021-10-14T14:04:32Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4856
dc.sourceIIOimport
dc.titleAn auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage104
dc.source.endpage112
dc.source.conferenceMaterials and Device Characterization in Micromachining III
dc.source.conferencedate17/09/2000
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 4175


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