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Conference contributions
Silicon surface roughening by the decomposition of hydrogen peroxide
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Silicon surface roughening by the decomposition of hydrogen peroxide
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Harald
;
Meuris, Marc
;
Mertens, Paul
;
Verhaverbeke, Steven
;
Heyns, Marc
;
Hellemans, L.
;
Snauwaert, J.
;
Dillenbeck, C.
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2044
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Acq. date: 2026-01-26
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Statistics
Views
2044
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-26
Citations