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Silicon surface roughening by the decomposition of hydrogen peroxide
Publication:
Silicon surface roughening by the decomposition of hydrogen peroxide
Date
1994
Proceedings Paper
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29570.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Harald
;
Meuris, Marc
;
Mertens, Paul
;
Verhaverbeke, Steven
;
Heyns, Marc
;
Hellemans, L.
;
Snauwaert, J.
;
Dillenbeck, C.
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2039
since deposited on 2021-09-29
414
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Acq. date: 2025-10-24
Citations
Metrics
Views
2039
since deposited on 2021-09-29
414
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations