A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

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Authors
Witvrouw, Ann; Du Bois, Bert; De Moor, Piet; Verbist, Agnes; Van Hoof, Chris; Bender, Hugo; Baert, Kris
Conference
Micromachining and Microfabrication Process Technology VI
Title
A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal
Publication type
Proceedings paper
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