Show simple item record

Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture

dc.contributor.authorYamagishi, Hajime
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.contributor.authorDonaton, R. A.
dc.contributor.authorBender, Hugo
dc.contributor.authorNogami, T.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T14:21:44Z
dc.date.available2021-10-14T14:21:44Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4955
dc.sourceIIOimport
dc.titleElectrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
dc.typeOral presentation
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; October 2000; San Diego, CA, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record