dc.contributor.author | Yamagishi, Hajime | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Donaton, R. A. | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Nogami, T. | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-14T14:21:44Z | |
dc.date.available | 2021-10-14T14:21:44Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4955 | |
dc.source | IIOimport | |
dc.title | Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.conference | Advanced Metallization Conference; October 2000; San Diego, CA, USA. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |